LIS-R2 PLUS is luminescence laboratory inspection tool for silicon process feedback and debugging. This tool provides industrial standard quality determination functions that assist with product improvement aspects.
| Function | As-cut Wafer | Half-processed Cell | Finished Cell | Mini-module | Thick Mono Slug |
|---|---|---|---|---|---|
| PL Imaging | ✔ | ✔ | ✔ | ✔ | ✔ |
| EL Imaging and Rs Imaging | Option | Option | |||
| QSS-PC and Calibrated Lifetime | Option | ||||
| IV, Suns-Voc Curves | Option | Option |