THE BEST QUALITY CONTROL WORKSTATION FOR MONO INGOTS AND WAFERS

LIS-R3 SLUG

PL imaging tool for inspection of mono slugs. Used for full inspection by Tier 1 CZ mono manufacturers.

  • No slug pre-treatments required
  • Proven reliability in 24/7 operation
  • Defects reveal (slip line, dark ring and so on)
  • Defects detect algorithm
  • Enlarged field of view in the latest version
FunctionAs-cut WaferHalf-processed CellFinished CellThick Mono Slug
PL Imaging✔✔✔✔
Mono-Si As-cut Wafer AnalysisOption
Thick Mono Slug AnalysisOption
Examples of PL Imaging for different slugs are displayed below. Please click the contact us button to request a full-function demo or make inquiries.