PL imaging tool for inspection of mono slugs. Used for full inspection by Tier 1 CZ mono manufacturers.
| Function | As-cut Wafer | Half-processed Cell | Finished Cell | Thick Mono Slug |
|---|---|---|---|---|
| PL Imaging | ✔ | ✔ | ✔ | ✔ |
| Mono-Si As-cut Wafer Analysis | Option | |||
| Thick Mono Slug Analysis | Option |