Wafer Inspection at Production Line Speed

iLS-W3

PL imaging tool for quality control and sorting of as-cut wafers
  • Contactless inspection and quality sorting
  • Easy integration
  • High throughput
  • Proprietary algorithm
  • Enlarged field of view in the latest version
Sample typesFunctions
As-cut WaferPL imaging
Analysis metrics for as-cut wafers
Examples of PL Imaging for different as-cut wafers are displayed below. Please click the contact us button to request a full-function demo or make inquiries.